E C E 528: Plasma Processing and Technology
- Catalog Description:
Introduction to basic understanding and techniques. Plasma processing of materials for semiconductors, polymers, plasma spray coatings, ion implantation, etching, arcs, extractive metallurgy and welding. Plasma and materials diagnostics.
- Credits: 3
- Prerequisites: Physics 322 or ECE 320 or equiv or cons inst
- Engineering Moodle Courses on the Web (formerly eCOW)