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E C E 528: Plasma Processing and Technology

  • Catalog Description:
    Introduction to basic understanding and techniques. Plasma processing of materials for semiconductors, polymers, plasma spray coatings, ion implantation, etching, arcs, extractive metallurgy and welding. Plasma and materials diagnostics.
  • Credits: 3
  • Prerequisites or Corequisites: Physics 322 or ECE 320 or equiv or cons inst
  • Official Course Description (pdf)