E C E 528: Plasma Processing and Technology

• Catalog Description:
  Introduction to basic understanding and techniques. Plasma processing of materials for semiconductors, polymers, plasma spray coatings, ion implantation, etching, arcs, extractive metallurgy and welding. Plasma and materials diagnostics.
• Credits: 3
• Prerequisites or Corequisites: Physics 322 or ECE 320 or equiv or cons inst
• Official Course Description (pdf)

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• Past Semester Courses

Fall 2012 (1132)

ECE/NE 528 Plasma Processing and Technology Fall 2012 (1) Sections: 001

Spring 2011 (1114)

ECE 528 Plasma Processing and Technology, Spring11 (1) Sections: 001

Fall 2009 (1102)

ECE/NEEP 528 Plasma Processing and Technology, Fall09 (1) Sections: 001