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E C E 542: Introduction to Microelectromechanical Systems

  • Catalog Description:
    Introduction to MEMS technology, devices and systems. Fundamentals of MEMS in fabrication, process integration, material mechanics of MEMS structures, sensors and actuators. Main topics in MEMS - microfluidics, optical MEMS, RF MEMS, BioMEMS, packaging, and CAD.
  • Credits: 3
  • Prerequisites: CE 335 or 340, or cons inst
  • Official Course Description (pdf)

    Moodle and D2L are being retired. Already, many Engineering courses are in Canvas rather than Moodle. Rather than using the Moodle links below, it is recommended that you use the Learn@UW site (learnuw.wisc.edu) to gain access to all of the LSM choices available to campus.